System Components

Load-lock Chamber

Mantis Deposition manufacatures a series of different system components such as throttle valves, load-lock chambers, lamp heaters etc. that can be fitted into your existing deposition system.

Throttle Valve

Mantis Deposition provides a range of throttle valves to fit onto sputtering system to control downstream pressure. The valves are made to order and equipped with PID controller.


Mantis deposition produces a range of in-house electronics to supplement its range of UHV instruments.

TITANIUM Process Automation

A comprehensive automation package is available for Mantis deposition systems. The software package enables automated control over almost all functions of the system to enable recipe driven processes. Additionally, standard functions such as automatic pump down and venting are included.