The MGC-75 gas cracker uses a proprietary, capillary cracking tube to efficiently dissociate molecular gases at relatively low temperatures. Fitted on a standard NW35CF flange the source can be fitted to almost any vacuum chamber. It can be used with a variety of gases including hydrogen, oxygen, ammonia, chlorine, fluorine and other gases. Ideal for flow rates of 0 to 1 sccm, the catalytic cracking mechanism delivers above 90% cracking efficiency of diatomic hydrogen with only 75W of power and less than 1000°C. The cracking mechanism delivers an ion free flux that eliminates substrate damage that occurs with other cracking methods.
Mantis MGC Gas Crackers are commonly used for sample preparation in surface analysis systems.
Surface Termination / Modification
MGC Gas Crackers are also used for the sample preparation before deposition such as e.g. hydrogen termination, passivation or oxygenation.
MGC Gas Crackers are used where space is limited and samples are small (e.g. 10 x 10 mm2) such as in compact MBE systems for the growth of nitrides, oxides or for the nitridation or oxidation of samples during/after layer growth.