• Mantis Deposition Systems
  • Mantis Deposition Systems
  • Mantis Deposition Systems
  • Mantis Deposition Systems

Thin-Film Systems

M Series (MBE)

The all new M Series range of platforms are based on our proven M600 system technology offering a very low and stable UHV performance for MBE researchers utilising a conflat flange platform. The M Series range regardless of size and complexity use the same proven technology whilst offering optimised characteristics depending on research specialisation and budget. All M Series platforms are controlled using our latest software control platform TITANIUM 10 control suite.

Q Series (PVD)

The all new Q Series range of platforms are based on our proven QPrep system technology offering UHV performance for PVD researchers utalising a conflat flange chamber. This allows true UHV to be achieved while allowing excellent chamber access through the large top-flange. The Q500 range all use the same proven technology whilst offering optimised characteristics depending on research specialisation and budget.

QUBE Series (High Vacuum)

QUBE is a compact universal sputtering and deposition system. The chamber features a large front door which allows easy access to the chamber for fast wafer loading and unloading, ideal for research, prototyping and low-volume production. The system is optimized for deposition using thermal evaporation, magnetron sputtering, electron beam evaporation and evaporation of organic materials.

System Components

We manufacture a series of different system components such as throttle valves, load-lock chambers, lamp heaters and more, these can be fitted into your existing deposition system.