Automatic matching network
We provide a matching unit that ensures a perfectly tuned source at a push of a button. Each matching unit is designed to meet the individual RFM.
Plasma Emission Monitoring
Optical plasma emission monitoring can provide an insight into which species are being generated in the plasma. The optical emission monitoring can be achieved by attaching a spectrometer to the RFM and monitoring plasma emission lines through a software package.
Manual or Motor-Driven Shutters
The RFM can be outfitted with an integral manual or motor-driven shutter. The shutters feature a rotary feedthrough which is magnetically coupled to ensure longevity.
The discharge zone is manufactured from high-quality materials ensuring minimal contamination of the beam. The discharge tube can be made out of PBN, quartz or alumina depending on your application.