RFM Ion Cleaning

Overview

The RFM utilise Mantis Deposition's extensive knowledge of plasma technology. By generating an inductively coupled plasma and applying a high voltage to source's exit grids, the RFM delivers a range of ion current and energies. The RFM is capable of delivering a current of up to 6mA/cm2 and beam energies ranging from 0.1keV to more than 1keV.

Applications

Sample Preparation
The RFM is employed in pre-deposition processes such as sample cleaning or sample pre-preparation.


Features

The RFM is designed with all metal vacuum seals and are fully bakeable to 250°C and are UHV compatible. The plasma discharge tube is constructed from a high purity ceramic, which is different depending on the operating gas of the source. The robust induction coil is internally cooled. Additionally, the gas inlet is water cooled to eliminate impurities from being outgassed from the steel of the gas inlet. The tip is also water cooled and coupled to the exterior shields. This keeps the RFM cool during operation and keeps your UHV environment pristine.

RFM for MATS 30
The RFM for MATS 30 fits onto a standard 4.5" CF flange and can be integrated into most deposition systems. The RFM is engineered to be field serviceable for a low cost of operation.

RFM for MATS 60
The RFM is integrated to a standard 6" CF flange and has a beam diameter of 60mm leaving the source. The large beam diameter makes it ideal for large sample applications. The RFM is mechanically robust and is engineered to be field serviceable for maximum operation time.

 

 


Options

Automatic matching network
We provide a matching unit that ensures a perfectly tuned source at a push of a button. Each matching unit is designed to meet the individual RFM.

Plasma Emission Monitoring
Optical plasma emission monitoring can provide an insight into which species are being generated in the plasma. The optical emission monitoring can be achieved by attaching a spectrometer to the RFM and monitoring plasma emission lines through a software package.

Manual or Motor-Driven Shutters
The RFM can be outfitted with an integral manual or motor-driven shutter. The shutters feature a rotary feedthrough which is magnetically coupled to ensure longevity.

Discharge Tubes
The discharge zone is manufactured from high-quality materials ensuring minimal contamination of the beam. The discharge tube can be made out of PBN, quartz or alumina depending on your application.


Specifications

Model RFM for MATS 30 RFM for MATS 60
RF Power 100-300W 100-600W
Beam Energy 0.1-1keV 0.1-1keV
Current Density Up to 5mA/cm2 Up to 6mA/cm2
In-vacuum Diameter 57mm 96mm
Mounting Flange NW63CF (4 1/2") NW100CF (6")
In-vacuum Length (standard) 290mm 290mm
Gas Compatibility O2, N2, H2, Ar... O2, N2, H2, Ar...
Minimum Cooling Water (0.5l/min) Water (0.5l/min)
Gas Flow 8-10sccm 10-15sccm