• Mantis Deposition Systems



The NanoGen sources produce nanoparticles by a "terminated gas condensation" method. The resulting nanoparticles tend to posses one additional electronic charge and this allows them to be electrostatically manipulated either through deflection, focusing or acceleration. The acceleration towards the substrate allows the particle impact energy to be controlled precisely. At low acceleration (<<1eV per atom) the particles soft-land without deformation. At higher energies they undergo a small degree of interface mixing and form a layer of bound nanoparticles. At very high energy the particles fuse to revert to bulk material. Such nanoparticle manipulation produces a wide variety of coating morphologies from nanoparticle powder, through porous films to crystalline structures.



Thin-film Solar Cells / High-efficiency Photovoltaics
Nanoparticles created by the Mantis NanoGen Source are applied to the surface of the solar panels to give efficiency enhancements resulting in greater energy production.

Fuel Cells
Increased surface areas and new structures enhance the catalytic properties resulting in lower material cost and improved performance.

Medical Devices
Nanoparticles are applied to the surface of the medical device. Control of film porosity provides control of drug elution for example.

Gas & Liquid Sensors
Tuned nanoparticle films are applied to dramatically increase the sensitivity and accuracy of the sensing equipment.

Nanoparticles are applied to the surface of the object. Applications include water purification and water splitting.

Magnetic Storage
Nanoparticles are applied to the surface of the disc under a vacuum and controlled conditions. Nanoparticle coatings give well developed magnetic domains resulting in higher storage density.


The NanoGen sources provide a high level control of nanoparticle generation by varying three main process components: aggregation length, gas pressure and the power density applied to the target. The gas flow characteristics within the condensation zone ensure refinement of size distribution of the beam to allow precise definition of the particle size. The sources can be supplied with user-selectable refinement zones to suit particular applications. Nanoparticles can be generated with as few as 30 atoms up to those with diameters close to 20 nm.

The NanoGen50 source incorporates a 2" magnetron sputter source. The magnetron is based on the Mantis Deposition CUSP-2iU source and has all metal seals. The design ensures that the source is UHV compatible as well as robust.

Compound nanoparticles such as oxides, hydrides and nitrides can be grown by adding a small amount of the reactive gas to the aggregation zone of NanoGen50. It is possible to control the mole fraction (and thus physical properties of material) of additional element by control of the partial pressure.


LN2 Cooled Jacket
LN2 cooled jacket provides an alternative cooling method of the nanoparticle source. LN2 cooling promotes generation of nanoclusters with different sizes and gives the user an increased experimental parameter space to work with.

In addition, the temperature control influences nanocluster formation and allows the operator to obtain nanoclusters with different morphology. As can be seen from the TEM images below, a nanoparticle made from the same material may change its structure from crystalline (in the case of water jacket cooling) to amorphous (in the case of LN2 cooled jacket) depending on the temperature in the aggregation zone of the nanoparticle source.

Custom Exit Apertures
We have designed a range of custom-sized exit apertures to alter the nanocluster dimensions. Please contact us for more details.

Manual or Motor-Driven Shutters
The sources can be outfitted with an integral manual or motor-driven shutter. The shutters feature a rotary feedthrough which is magnetically coupled to ensure longevity.

Automation Software
An automation and software package is available for the NanoGen sources that delivers higly reproducible recipe driven processes. The automation control includes motorised linear feed, power and gas control.


Model NanoGen50
Mounting Flange NW150CF (8")
In-vacuum Length 0
Instrument Length 300mm
Cluster Range 1-20nm
(material dependent)
Size Variation +/-15%
(flow/power dependent)
Gas Flow 5-100sccm Ar/He
Minimum Cooling Water (0.5l/min) / LN2