Load-lock Chamber

Overview

Load-lock Chamber
Mantis Deposition provides a range of load-lock chambers that can be mounted for clean sample transfer while leaving main chamber under vacuum. Sample transfer system are made to order and can include:

  1. Sample pre-treatment
  2. Suitable for 1" - 8" samples
  3. Viewport in sample entry door
  4. Combination gauge to allow pressure measurement
  5. Two linear transfer arms (for use with two deposition chambers)
  6. Port for turbo pump
  7. Bakeout lamp option for sample pre-cleaning
  8. Manually or automatically actuated gate valve to main chamber