Thin-Film Systems

Q Series

The Q Series system is ideally suited for a variety of thin film deposition techniques such as e-beam evaporation, magnetron sputtering, thermal evaporation and nanoparticle deposition. Its modular design allows the user to combine these deposition methods to obtain highly engineered thin film coatings. The Q Series platform is configured to accept 2"-6" samples as standard.

M Series

A highly modular and flexible MBE platform. The all metal seal design along with external bakeout tent delivers the base vacuum pressure better than 5x10-10 mbar. The system is designed to accept sample wafers with 1"-6" diameter. The platform's functionality is enhanced with the addition of the range of K-cells and RF atom sources for doping applications.

QUBE Series

QUBE is a compact universal sputtering and deposition system. The chamber features a large front door which allows easy access to the chamber for fast wafer loading and unloading, ideal for research, prototyping and low-volume production. The system is optimized for deposition using thermal evaporation, magnetron sputtering, electron beam evaporation and evaporation of organic materials.


NanoSys system provides the highest levels of film purity and vacuum performance in the field of nanoparticle research. The spherical chamber configuration ensures the optimised geometry for nanoparticle deposition and allows a substanital number of PVD deposition tools to be incorporated in the system. The NanoSys platform is configured to accept 2" samples as standard.