Nanoparticle Deposition RF Atom Sources for atomic oxygen and atomic nitrogen Mini E-beam evaporators RF Ion Sources Thermal atomic oxygen and atomic hydrogen source Deposition systems

 

 
Mantis Deposition offers turnkey deposition systems with an emphasis on configuration flexibility. Our systems are based around our own UHV deposition components and extensive experience with deposition processes.

Our Q-Prep systems offer a cost-effective and highly labour-saving alternative to self-procurement and assembly by researchers wishing to build up a new deposition facility on a limited budget.

Alternatively, we can offer a 'design and implement' service where we use your concepts to design a custom system which we then build and test for you to agreed specifications.

Nanosys 500 with Load-lock option


Qprep-500 unpopulated

Our deposition components allow systems to be configured for a variety of processes including:
  • Sputter-deposition
  • Ion-beam deposition
  • E-beam evaporation/metallisation
  • Nanoparticle deposition or nanocomposite materials
  • Bolt-on surface science preparation chambers

We can add multiple deposition components from our range (see here) , or incorporate third-party components on request to enable complex material families to be deposited.

 

Qprep-250

The systems can be configured to a varying degree of complexity with options such as:
  • Heated, rotating, biased substrate table
  • Load-lock, glove box, or, for the ultimate cleanliness, integrated load-lock/glove box combination.
  • Internal or external bakeout for UHV systems
  • Deposition rate monitoring
  • Turbo or cryo pumped systems
  • Oil-free pumping
  • Full Automation including recipe-driven deposition programmes
     


CF-flanged box-coater

 

  Contact us with your ideas or to request more information on our turnkey systems.