• Mantis Deposition Systems


Dr. Grant Johnson operating QPrep500 deposition system equipped with nanoparticle technology. The system is installed at Pacific Northwest National Laboratory.

Dr. Grant Johnson

Pacific Northwest National Laboratory, USA

"We purchased a complete nanoparticle deposition system from Mantis which was installed at Pacific Northwest National Laboratory in April 2012. The deposition system includes the NanoGen-Trio magnetron-sputter gas aggregation nanoparticle source, the linear core-shell-coater and the MesoQ quadrupole mass-filter. The system is fully automated to enable facile control over process parameters using a personal computer.

So far, our experience with both the company and the equipment has been good. Their sales representative was knowledgeable about technical matters and was able to address our concerns throughout the design, construction, delivery and installation. The installation engineers were competent and obviously have significant experience in various types of material deposition. So far, the system is functioning well and we have been able to produce nanoparticles of several different metals, deposit them onto surfaces, and image them with electron microscopy and atomic force microscopy to determine size and morphology. We have also used the Nanogen-Trio to generate bimetallic nanoparticles and have confirmed their mixed elemental composition using x-ray photoelectron spectroscopy. We are currently working with Mantis to determine the optimal process conditions for generating nanoparticles from more challenging magnetic as well as non-conducting materials using the NanoGen source.

In summary, the Mantis equipment is well built and carefully put together. The software/automation is user friendly and offers a great deal of control over the process parameters. In addition, the scientists and engineers at the company have been helpful and forthcoming with whatever information or assistance we have requested.

Please note that the opinions expressed in this letter are my personal opinions, and do not represent an official position of Battelle Memorial Institute, of the Pacific Northwest National Laboratory or of the US Department of Energy."

QPrep500 sputter deposition system installed at Physics Department, Durham University

Dr. Aidan Hindmarch


Department of Physics, Durham University, UK

"The activities of our research group are primarily focussed on magnetic thin-film multilayers for investigating spintronics and nanoscale magnetism. The materials we are interested in are typically ultra-thin films of ferromagnetic metals, e.g., Co, Ni, Fe and their alloys, sandwiched between adjacent layers of non-magnetic metals or oxide insulators, or grown onto compound semiconductor wafer substrates. We are generally interested in the magnetic, structural (layer and crystal structure), and electrical properties of the sheet materials, patterned structures, and devices which we fabricate from sputtered thin-films.

We have a Mantis UHV sputter deposition system with 5 magnetron sputter sources and sample heating up to around 800 degrees C, a load-lock with 5-sample storage carousel, and have recently had a reflection high-energy electron diffraction (RHEED) system installed to enable us to monitor the surface structure of both wafer substrates and growing films. Our system is used for growth of thin-films and multilayered structures where the typical layer thicknesses range from sub-nanometer to around 50 nanometers. For films in this thickness range, and for the properties we are interested in, the quality and roughness of interfaces between layers is critical: with the right deposition parameters we find that the quality of the films produced by our system is on a par with the state-of-the-art worldwide.

The Mantis system is easy to use and the software automation is easy to get to grips with. Vacuum performance is extremely good, with our UHV system routinely running in the nanoTorr range without particular effort on our part. Reproducibility of films is very good, both in terms of layer thicknesses, roughness, and alloy compositions from co-sputtering. We have also been very happy with our dealings with Mantis: the tendering, system specification, and design stages were painless; the system is well designed and well-made, and was installed in our lab smoothly and tested thoroughly. These processes have been repeated with the various successful upgrades to the system which Mantis have fabricated and installed for us. Overall, we are very pleased with our Mantis sputter system!"

"Size and composition-controlled fabrication of VO2 nanocrystals by terminated cluster growth" Cesar Clavero, Jonathan L Slack and Andre Anders; Lawrence Berkeley National Laboratory, eScholarship (2014)

Dr. Andre Anders

Senior Scientist and Principal Investigator at Lawrence Berkeley National Laboratory, USA

"We explored the market for devices producing nanoparticles in a vacuum chamber in conjunction with common magnetron sputtering. We found the NanoGen50 by Mantis Ltd, a compact device that implements controlled cluster growth by sputtering a target at relatively high gas pressure. We purchased not only the NanoGen50 but also the MesoQ mass filter, which allows us to narrow the size distribution of the nanoparticles. With the help of Mantis' staff, we were operating quickly after delivery, and were able to produce nanoparticles of metals and of metal oxides. We were particularly interested in producing oxides of vanadium, which was possible due to the distinct degrees of freedom of the cluster growth process, fully enabled and controlled by Mantis' design. We look forward to expanding process possibilities by incorporating the multi-target option for the generator offered by Mantis."

QPrep500 sputter deposition and e-beam evaporation system installed at Department of Materials, Imperial College London

Dr. Peter Petrov

Faculty of Engineering, Department of Materials, Imperial College London, UK

"The equipment (Modular Deposition System (QPrep500), for 4" Wafers: Magnetron Sputtering and E-Beam Evaporation) was delivered, installed and tested in 2010 in the laboratory at Department of Materials, Imperial College London. Since then it has been successfully run delivering interesting results for students and researchers.

The system combines sputtering and evaporation methods and includes three 3" magnetrons and QUAD-EV-HP e-beam evaporator. The integrated load-lock chamber provides manual sample transfer in to the main deposition chamber. The rest of the system is fully automated and the software features an easy interface to all instruments, enabling the user to set and store all process parameters.

My experience with the technical support provided by Mantis team has been positive too. Whenever issue has been raised, Mantis engineers were very co-operative and the response action was prompt.

Therefore I do not have any hesitations recommending this system."

M600 deposition installed at Institute of Applied Laser, Photonics and Surface Technologies ALPS, Bern University of Applied Sciences

Dr. Thomas Nelis

Bern University of Applied Sciences, Switzerland

"We own and operate a Mantis M600 system, which was ordered in 2013.

It was installed in 2014 and we have found that it has operated well and within specification to date. Mantis Deposition have been supportive of their equipment during the warranty period and I would recommend their equipment to other thin film groups."