DEPOSITION SYSTEMS

With applications ranging from a simple metallization coating to complex epitaxial growth, to high precision nanoparticle deposition, Mantis Deposition will engineer a completely integrated deposition system exceeding the technical demands of your application. Built from one of the multiple system platforms, each system is tailored

with optimised sources, pumping, automation software and sample handling to provide a user-friendly and complete deposition system. Contact our worldwide expert staff to learn more about the best Mantis Deposition system for your process.

M SERIES

A highly modular platform that can be configured to operate as a high vacuum or UHV deposition system. The all metal seal design delivers the pristine environment for the highest performance purity deposition. Multiple platforms are available from small scale R&D with 1" samples to 6" diameter automated processing.

Specifications and Applications

QPREP SERIES

A highly modular platform that can be configured to operate as a high vacuum or UHV deposition system. The all metal seal design delivers the pristine environment for the highest performance purity deposition. Multiple platforms are available from small scale R&D with 1" samples to 6" diameter automated processing.

Specifications and Applications

QBOX SERIES

Delivers quick access and sample exchange for a variety of processes. A large access door with viton seal gives complete and rapid access for sample exchange and maintenance. Able to be configured with most of the Mantis Deposition sources as well as can be configured for multi-sample batch processing, the QBox is a versatile platform for the ever changing material research needs.

Specifications and Applications

NANOSYS SERIES

A highly modular platform that can be configured to operate as a high vacuum or UHV deposition system. The all metal seal design delivers the pristine environment for the highest performance purity deposition. Multiple platforms are available from small scale R&D with 1" samples to 6" diameter automated processing.

Specifications and Applications

TABLE TOP SERIES

A highly modular platform that can be configured to operate as a high vacuum or UHV deposition system. The all metal seal design delivers the pristine environment for the highest performance purity deposition. Multiple platforms are available from small scale R&D with 1" samples to 4" diameter automated processing.

Specifications and Applications

HEX SERIES

A highly modular platform that can be configured to operate as a high vacuum deposition system. It can be quickly reconfigured at low additional expense to provide an easy training platform for various deposition/coating techniques ranging from sample preparation for surface analysis to e-beam, sputtering, thermal and a range of other thin film deposition techniques.

Specifications and Applications

UHV Components
Already have a deposition system? All of our components are engineered for UHV.






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The expert team of Mantis Deposition engineers and staff scientists has the long history of experience to assist in choosing the optimum configuration of your deposition system. Various members of our team have more than 20 years of high vacuum and UHV deposition experience.